几种MOCVD用挥发性β-二酮类金属螯合物的合成及初步研究  

Synthsis and Preliminary Study of Some Volatile Metal Beta-Diktone Chelates

作　　者：曹传宝[1] 彭定坤[1] 杨萍华[1] 孟广耀[1] 张国赏[2] 

机构地区：[1]中国科学技术大学材科科学与工程系 [2]中国科学技术大学结构分析开放研究实验室

出　　处：《中国科学技术大学学报》1992年第3期336-341,共6页JUSTC

摘　　要：以丙酮为初级原科,逐步合成频那酮。三甲基乙酸,最后合成了β-二铜螯合剂DPM,红外光谱鉴定表明合成是成功的。以β-二酮类螯合剂AA,DPM,TFAA,及FOD与Y,Ba,Cu,Zr等中心原子合成了它们的螯合物。热重分析表明,螯合物的挥发性同配体的空间位阻及F代原子数目有关,配体的空间位阻越大,F代原子数目越多,则螯合物的挥发性越好;同时与中心原子的离子半经密切相关,中心原子的离子半经越小,则螯合物的挥发性越好。此外,对几种螯合物进行了质谱研究,以推测它们在plasma-MOCVD过程中的可能行为。One of the impotent deta-diktone ligands, DPM (2, 2,6,6-Tetramethyl 3,5-heptandione), is successfully synthesized. Its IR spectrum agrees exactly with the standard spectrum. By using AA, DPM, TFAA, FOD as ligands and Y, Ba, Cu, Zr as center atoms, several metal beta-dikione chelates are successfully synthesized. Thermogravity analysis indicates that the volatility of chelates is related to the ligand's space block and the number of F atoms. The greater the ligand's space block, the better the chelate's volatility. And the more the F atoms in ligands, the greater the chelate's volatility. It is also found that the chelate's volatility is colsely related to the radius of the center atom. When the center atom's radius decreases, the volatility of chelate increases. In this report, mass spactra of several chelates are also studied.

关 键 词：Β-二酮 金属 有机化合物 MOCVD 

分 类 号：O641.4[理学—物理化学]