光学镀膜近红外膜厚监控的信号压噪  

Depress noise of near infrared signal for optical coating

作　　者：马云飞[1] 王自鑫[1] 江绍基[1] 佘卫龙[1] 朱析[1] 蔡志岗[1] 李宝军[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《光学仪器》2004年第2期99-104,共6页Optical Instruments

摘　　要：在光学真空镀膜膜厚监控过程中,近红外波段信号弱、外界干扰大、信噪比低,难于检测监控。运用相干检测、锁相放大原理,在光学真空镀膜机可见光波段监控系统的基础上,自行研制锁相放大器和改装近红外探头,成功地实现了近红外信号的压噪、放大、滤波和检测监控。To amplify, filter, and monitor weak near infrared signal from strong noise during optical coating, a locking-in amplifier with near infrared detector has been designed based on the principle of visible optical monitoring system for optical coating. By using the designed locking-in amplifier, the weak near infrared signal was monitored successfully from the strong noise during optical coating and the characteristics of the weak near infrared signal was characterized easily.

关 键 词：近红外 光学薄膜 膜厚监控 锁相放大 光学镀膜 压噪 

分 类 号：O484.41[理学—固体物理]