MEMS——电子领域的新宠  

MEMS HAS CAUGHT GREAT ATTENTION IN ELECTRONICS FIELD

作　　者：黄萍[1] 孙继萍[2] 

机构地区：[1]山东师范大学物理与电子科学学院,济南250014 [2]山东师范大学实验室管理处,济南250014

出　　处：《山东师范大学学报（自然科学版）》2004年第2期50-52,共3页Journal of Shandong Normal University(Natural Science)

摘　　要：微机电系统技术 (MEMS)是随着半导体集成电路微细加工技术和超精密机械加工技术的发展而发展起来的 .其微型化、集成化、批量生产和多学科交叉等优良特性将对人类社会生活带来巨大的进步 ,是电子领域的新宠 .Micro-Electro-Mechanical System(briefly named MEMS)has grown up along with the development of semiconductor's integrate circuit minuteness machine technology and exceed exactitude machine process technology.Its characteristic such as micromation,integration,batch production and inter-discipline,which has caught great attention,will bring a large progress in people's life.

关 键 词：MEMS 微机电系统技术 电子 超精密机械加工 

分 类 号：TH-39[机械工程]