一种新颖的基于MEMS技术的光读出热成像系统性能分析与制作  

DESIGN AND FABRICATION OF A NOVEL OPTICALLY READABLE THERMAL IMAGING SYSTEM BASED ON MEMS TECHNOLOGY

作　　者：冯飞[1] 焦继伟[1] 熊斌[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《红外与毫米波学报》2004年第2期125-130,共6页Journal of Infrared and Millimeter Waves

基　　金：国家"九七三"集成微光机电系统研究资助项目 (G19990 3 3 10 1)

摘　　要：提出了一种新颖的光读出红外热成像系统设计 .该系统利用光学读出技术将红外图像直接转化为可见光图像 ,其核心部件是一个基于微电子机械技术 (MEMS)制作的法布里 泊罗 (Fabry Perot)微腔红外探测器列阵 (F PMCIRDA) .通过对Au/SiNx双材料体系的理论分析 ,得出了可动微镜的最大热 机械灵敏度、机械 光灵敏度及其温度响应分别为 6 .4 7× 10 -9m/K、1.5 3× 10 8m-1、2 .0 5× 10 -4.对系统噪声分析表明 :在目前的设计中 ,系统的噪声等效温差 (NETD)为 5 .1K ,而其极限值有望达到 5 8mK .采用体硅MEMS工艺 ,制作出了 5 0× 5 0的Fabry Perot微腔列阵 .实验表明 ,在红外辐射作用下 ,可动微镜有明显的位移 。A novel optically readable infrared thermal imaging system that directly translates infrared image into visible image by using optically readable technology was presented. Its key part is a Fabry-Perot Micro-Cavity Infrared Detector Array (F-P MCIRDA) based on MEMS (micro-electro-mechanical system) technology. Maximal thermo-mechanical, opto-mechanical sensitivity and temperature response of the movable micromirror are 6.47 x 10(-9) m/K, 1.53 x 10(8) m(-1) and 2.05 x 10(-4), respectively, as theoretical analysis results for bi-material Au/SiNx. System noise analysis indicates that the NETD of the present design and the expected limit of the NETD are 5.1 K and 58mK, respectively. A 50 x 50 F-P MCIRDA has been successfully fabricated by using bulk MEMS technology. The initial measurement results indicate that obvious displacement of the moveable micromirrors can be observed as the infrared radiation irradiates on. The operating principle of this system is verified successfully.

关 键 词：徽电子机械技术 法布里-泊罗微腔红外探测器列阵 噪声等效温差 光读出热成像 机械-光灵敏度 热-机械灵敏度 

分 类 号：TN216[电子电信—物理电子学]