离子束增强沉积碳膜及其在抑制电子发射中的应用  

Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission

作　　者：柳襄怀[1,2,3] 朱宏 任琮欣[1] 郑志宏[1] 徐静芳[4] 陈树德[5] 

机构地区：[1]中国科学院上海微系统与信息技术研究所离子束重点实验室 [2]华东师范大学信息学院电子工程系上海200062 [3]华东师范大学理工学院物理系上海200062 [4]华东师范大学信息学院电子工程系 [5]华东师范大学理工学院物理系

出　　处：《核技术》2004年第5期334-343,共10页Nuclear Techniques

基　　金：国家重点基础研究发展计划(973 计划) 资助项目(G2000067207-2)

摘　　要：栅电子发射是影响行波管工作性能和制约其使用寿命的主要因素。国内研制的导弹雷达制导用行波管因存在严重的栅电子发射现象,寿命只有70h,不能付诸军事应用。采用离子束增强沉积的方法在栅网表面沉积一层碳膜后,可有效地抑制栅电子发射,使行波管寿命超过了1000h,在军事和航天领域获得了成功应用。报导了低能离子束增强沉积类金刚石薄膜和高能离子束增强沉积类石墨碳膜的制备技术、结构性能及其在抑制栅电子发射中的应用和机理研究的结果。Electron emission from grid is a serious problem for it limits the service time and destroys the working condition of the traveling wave tubes. After coating carbon films on the surface of the control grid by ion beam en- hanced deposition (IBED) in our laboratory, the electron emission from control grid was suppressed. One of the trav- eling wave tubes with control grid treated with coating carbon film already had a service time more than 1000 h. This technology has already been used in defense and aviation field successfully. The preparation and properties of two kinds of carbon films-diamond like carbon and graphite like carbon, their applications and mechanism for suppression of electron emission are presented in this paper.

关 键 词：离子束增强沉积 碳膜 抑制电子发射 

分 类 号：TN124[电子电信—物理电子学] TN305.3