基于SIMOX技术的高温压力传感器研制  

Development of High Temperature Pressure Transducer Based on the SIMOX Technology

作　　者：赵玉龙[1] 赵立波[1] 蒋庄德[1] 

机构地区：[1]西安交通大学精密工程研究所,西安710049

出　　处：《仪器仪表学报》2004年第2期149-151,共3页Chinese Journal of Scientific Instrument

基　　金：国家 8 63计划 MEMS预启动基金项目 (10 1- 0 1) ;国家 863计划 MEMS重大专项资助 (2 0 0 2 AA40 44 70 )

摘　　要：应用氧离子注入 (Separation by Implantation of Oxygen) SIMOX技术 ,制作适合于高温环境条件下的固态压阻式硅隔离 (SOI)压力敏感元件。采用了一种新型梁膜结合封装工艺 ,有效地解决了被测压力高温冲击问题 ,可应用于航空、航天发动机等恶劣环境下的压力测量。The SIMOX(separation by implantation of oxygen) technology has been adopted for developing the piezoresistive SOI sensitive element which is used in the high temperature circumstance. The high temperature impact of the pressure has been solved effectively by a new type of the combined beam-film encapsulation process. The kind of high temperature pressure transducer can be used in checking and measuring the pressure of engines in spaceflight or aviation under harsh environment, and so on.

关 键 词：氧离子注入 SIMOX技术 高温压力传感器 研制 硅隔离 封装 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]