基于LIGA技术的微细电火花加工优化研究  

Optimal process of micro-EDM based on LIGA technique

作　　者：邹丽芸 张院春 彭良强[2] 黄军容[2] 伊福廷[2] 张菊芳[2] 韩勇[2] 

机构地区：[1]北京市机电院高技术股份有限公司,北京100002 [2]中国科学院高能物理研究所,北京100039

出　　处：《电加工与模具》2004年第B05期39-41,共3页Electromachining & Mould

基　　金：北京市自然科学基金资助项目 (3 0 2 2 0 0 5 );国家 863高技术研究发展计划资助项目 (2 0 0 2AA43 115 0和 2 0 0 3AA40 40 40 )

摘　　要：比较了活动掩膜法与固定掩膜法得到的PMMA胶结构 ,实验表明固定掩膜法更适合于多次曝光。结合LIGA技术和微细电火花加工的优点 ,用LIGA技术制备出具有复杂形状的铜微细工具电极 ,再用该工具电极进行微细电火花加工 ,在不锈钢上加工出异形微细孔。并通过进一步调整电火花加工工艺参数 ,优化了加工尺寸精度和表面粗糙度。It is shown in this paper by the comparing experiments that the method with fixing mask is more suitable for multi-lithography than the removable mask. It has been studied that the fabrication of copper microelectrode with complicated shape by LIGA process and the machining of stainless steel workpiece by EDM process with this microelectrode, which combines the excellences of LIGA and EDM. The optimization parameters of EDM process have been obtained, by which the dimension precision and the surface quality can be controlled better.

关 键 词：微细加工 LIGA技术 电火花加工 活动掩膜法 固定掩膜法 PMMA胶 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]