温度对纳米ZnO膜电学光学性质影响的研究  

Temperature influence on optical and electric properties of nano ZnO film

作　　者：曹琦[1] 李相银[1] 

机构地区：[1]南京理工大学物理系,南京210094

出　　处：《物理学报》2004年第5期1572-1576,共5页Acta Physica Sinica

摘　　要：用水解加热法制得的纳米ZnO粉末 ,并将ZnO粉末用电泳法淀积在二氧化硅玻璃衬底上 ,综合地研究了当衬底温度发生变化时ZnO薄膜的电学光学特性的变化规律 .x射线图片显示ZnO薄膜在自然状态下是纤锌矿结构 ,薄膜在衬底温度 6 6 3K时有最小的电阻率 6 9× 10 - 2 Ωcm和 83%的高透过率 .In this investigation, zinc oxide powder has been prepared by hydrolysis pyrogenation method and deposited on SiO 2 glass by electrophoresis method. A systematic study has been made on the structure and electrical and optical properties of ZnO films as functions of substrate temperature. The X-ray diffraction studies revealed that the films were polycrystalline with a wurzite structure. Films with a minimum resistivity of 6.9×10 -2Ωcm and high transparency of 83% have been achieved at a substrate temperature of 663K.

关 键 词：电阻率 透过率 氧化锌薄膜 衬底温度 水解加热法 纤锌矿结构 半导体材料 

分 类 号：O482[理学—固体物理]