微机械(MEMS)与微细加工技术  

The new development of MEMS and micro-machining

作　　者：段润保[1] 赵砚江[2] 毛言理[2] 

机构地区：[1]上海交通大学机械与动力工程学院,上海030020 [2]河北理工学院机械工程系,河北唐山063009

出　　处：《河北理工学院学报》2004年第2期34-40,共7页Journal of Hebei Institute of Technology

摘　　要：首先对微机械(MEMS)的分类及其特点作了简明的阐述,在此基础上,着重评介了近年来该领域各种微细加工方法及其能够达到的加工尺度与水平。指出当前微细加工技术仍然在以使用物理和化学能量的特种加工为主,并呈现加工材料扩大化、产品机构复杂和加工手段复合化的发展态势。Based on the general grasp of the classification and charicteristic of MEMS, this paper summarizes vari- ous micro and precision processes in this field and its dimensional limitation and capacity. Some photos are selecct- ed to show related micro-tools and machining equipment. Finally, the paper concluded that the nontraditional processes, which use physical and chemical energy,are still playing a main role in MEMS, at the same time three tendencies are emerging. These three tendencies are as follow: (1) Materials to be machined are being broadened; (2) The products and parts of MEMS are becoming more complicated; and (3) Different manufacturing processes are mixing together.

关 键 词：微机械 微细加工 MEMS 超精密机械加工 电子柬刻蚀 微细电火花加工 微细超声加工 

分 类 号：TH161[机械工程—机械制造及自动化]