电磁型双稳态射频开关的微机械结构设计  

Micromechanical Structural Design of Electromagnetically Actuated Bistable RF Micro-Electro-Mechanical Systems Switches

作　　者：张永华[1] 丁桂甫[1] 赵小林[1] 马骏[1] 蔡炳初[1] 

机构地区：[1]上海交通大学薄膜与微细技术教育部重点实验室,上海200030

出　　处：《上海交通大学学报》2004年第5期725-728,共4页Journal of Shanghai Jiaotong University

基　　金：国家高技术研究发展计划(863)项目(2003AA404140);信息产业部电科院预研项目(41308050116);国家自然科学基金资助项目(10377009)

摘　　要：提出了利用电磁驱动机理优点的双稳态射频微电子机械系统(RFMEMS)开关结构形式.开关的微驱动部分由导磁的悬梁、扭梁和线圈、永磁体组成.由于采用了永磁铁单元,可以实现对开关的双稳态电磁控制,从而降低了开关的功耗.对开关的微机械结构进行力学分析的结果表明,含有加强筋结构的开关模型,在12μN力的作用下,可以使悬梁两端产生20μm的位移,此时系统的固有振动频率约为5.7kHz.A novel bistable radio-frequency (RF) micro-electro-mechanical systems (MEMS) switch utilizing the advantages of electromagnetic actuation was presented. The microactuated part consists of cantilever, torsional girder, planar coils and permanent magnets. The cantilever beam has two stable positions as the permanent magnets are used. The micromechanical structure of the switch was analyzed by means of mechanics. The results reveal that the switching distance of the cantilever of the switch model with stiffening rib is 20 μm under the force of 12 μN on the beam, and the natural frequency of the switch is about 5.7 kHz.

关 键 词：射频 微电子机械系统 开关 双稳态电磁驱动 模型分析 

分 类 号：TN402[电子电信—微电子学与固体电子学]