激光调阻机多档测量误差的软件自适应校正  

Adaptive correction of multi-range measuring errors of laser resistor trimming machine

作　　者：王志娟[1] 郭晓光[1] 孙继凤[1] 汤建华[1] 于前洋[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光学精密工程》2004年第3期259-264,共6页Optics and Precision Engineering

基　　金：国家高技术产业化光电子专项项目(No.2002055);长春市科技攻关计划项目(No.02 130G22)

摘　　要：为了减小激光调阻机测量系统的多档测量误差对阻值修调精度的影响,提出了一种基于有源单臂电桥测量原理自适应地校正激光调阻机多档测量误差的方法。通过测量和标定高精度标准电阻的测量误差,自适应地获取校正激光调阻机多档测量误差的系列修正值,进而用系列修正值对所有待修调电阻的阻值测量误差进行校正,达到进一步减小系统测量误差的目的。实践证明,在测量硬件电路保证高稳定性、微小波动性测量的前提下,应用该方法可使测量系统的精度指标达到:低阻区(R<100Ω)为±0.5‰;中阻区为±0.2‰;高阻区(R≥1MΩ)为±2‰。An adaptive correction method based on the measuring theory of Wheatstone bridge is proposed to reduce the effect of the multi-range measuring errors of a laser resistor trimming machine on the resistance adjusting accuracy. The corrected values in series to be used for correction of multi-range measuring errors of laser resistor trimming machine are adaptively obtained by measuring and calibrating the measuring errors of high precision standard resistors, and they can be used to correct all the resistance measuring errors of resistors to be adjusted to further reduce the system measuring errors. It is proved in practice that if a measuring system has good stability and low fluctuation, the precision of measuring system could be ±0.5‰ in low resistance (R<100 Ω) zone; ±0.2‰ in middle resistance zone; ±2‰ in high resistance (R≥1 MΩ) zone.

关 键 词：激光调阻机 有源单臂电桥 测量系统 测量误差 电阻标定 

分 类 号：TN249[电子电信—物理电子学]