微测辐射热计型非制冷红外焦平面探测器技术新进展  

New Progress of Uncooled Infraredray Focal Plane Array and Detector Technology Based on Microbolometer Type: A Review

作　　者：邓荣春[1] 卢杰 徐立中 胡荣群[1] 

机构地区：[1]南昌理工学院电子与信息学院,江西 南昌 [2]航空工业洪都集团660研究所,江西 南昌 [3]河海大学计算机与信息学院,江苏 南京

出　　处：《光电子》2021年第4期158-167,共10页Optoelectronics

摘　　要：近年来,随着大规模集成电路、半导体薄膜、微机电系统等科技进步,微测辐射热计型非制冷红外焦平面探测器技术快速发展,已成为目前技术最成熟、市场占有率最高的一种焦平面探测器型式。本文介绍了红外焦平面探测器分类、微测辐射热计型非制冷红外焦平面探测器工作原理及总体设计、制造与工艺、测试等关键技术模块。综述了国内外相关技术最新进展和领域应用。最后,总结指出了非制冷红外焦平面探测器技术发展趋势及发展方向,包括:1) 亚波长微纳光学技术与像元中心距压缩到10 μm以下更小尺寸的超高清红外成像;2) 基于新一代TSV (硅通孔技术)三维垂直封装的三维单芯片系统(3DSoC)技术与红外热像机芯/模组的集成化与智能化;3) 无快门(shutter-less)技术结合无热电冷却元件(TEC-less)与进一步降低系统功耗等。In recent years, with the scientific and technological progress of large-scale integrated circuit, semiconductor films and micro-electro-mechanical system, the technology of uncooled infrare-dray focal plane array based on microbolometer type develops rapidly, and has become a focal plane detector type with the most mature technology and highest market share. In this paper, the classification of infrared ray focal plane array and detector, the working principle of uncooled infraredray focal plane array based on microbolometer type and overall design of the detector, manufacturing engineering, testing and other key technical modules are introduced. The latest development and application of related technologies at home and abroad are reviewed. Finally, the development trend and direction of uncooled infrared focal plane array and detector technology are summarized, including: 1) subwavelength micro-nano optics technology and ultra-high- definition infrared imaging with pixel pitch of the microbolometer compressed to less than 10 μm;2) the 3DSoC (three-dimensional system on-chip) with the 3D vertical package of a new generation TSV (through silicon via) and the integration and intellectualization of infrared camera core/module;3) shutter-less technology combined with TEC-less and further reduces system power consumption.

关 键 词：非制冷红外焦平面阵列 微测辐射热计 微机电系统 芯片 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]