国家自然科学基金(sBK2011010)

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相关期刊:《Chinese Physics B》更多>>
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GaN hexagonal pyramids formed by a photo-assisted chemical etching method
《Chinese Physics B》2014年第5期588-593,共6页张士英 修向前 华雪梅 谢自力 刘斌 陈鹏 韩平 陆海 张荣 郑有炓 
Project supported by the National Basic Research Program of China(Grant Nos.2011CB301900,2012CB619304,and 2010CB327504);the National High Technology Research and Development Program of China(Grant No.2011AA03A103);the National Nature Science Foundation of China(Grant Nos.60990311,60906025,60936004,and 61176063);the Natural Science Foundation of Jiangsu Province,China(Grant Nos.BK2011010 and BK2009255)
A series of experiments were conducted to systematically study the effects of etching conditions on GaN by a con-venient photo-assisted chemical (PAC) etching method. The solution concentration has an evident influe...
关键词:hexagonal pyramids GAN photo-assisted chemical etching 
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