国家自然科学基金(51375038)

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相关机构：北京化工大学清华大学吉林大学中国科学院更多>>
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A Performance Driven Lot Merging Method with Closed Loop Optimization for Semiconductor Wafer Fabrication
《Chinese Journal of Electronics》2017年第5期912-918,共7页CAO Zhengcai HUANG Zhexiao LIU Min 
supported by the National Natural Science Foundation of China(No.51375038);the Doctoral Fund of Ministry of Education of China(No.20130010110009);the Beijing Municipal Natural Science Foundation(No.4162046)
This paper deals with lot merging problem in semiconductor wafer fabrication system.There is the possibility to merge two or more partial lots into single lot if their subsequent process routes are the same,an improve...
关键词：Semiconductor wafer fabrication Lot merging SIMULATION Bin packing 
Simultaneous Prediction for Multiple Key Performance Indicators in Semiconductor Wafer Fabrication被引量：1
《Chinese Journal of Electronics》2016年第6期1159-1165,共7页CAO Zhengcai LIU Xuelian HAO Jinghua LIU Min 
supported by the National Natural Science Foundation of China(No.61104172,No.51375038);the Doctoral Fund of Ministry of Education of China(No.20130010110009);Beijing Municipal Natural Science Foundation(No.4162046);the Open Research Project from SKLMCCS(No.20120104);the Open Project Program of Key Laboratory of Symbolic Computation and Knowledge Engineering of Ministry of Education,Jilin University(No.93K172014K05)
The prediction and key factors identification for lot Cycle time(CT) and Equipment utilization(EU) which remain the Key performance indicators(KPI)are vital for multi-objective optimization in semiconductor manufactur...
关键词：Prediction for MKPI Cycle time Equipment utilization BNN Key factors identification 
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