NANOPATTERN

作品数：10被引量：6H指数：2
导出分析报告
相关领域：电子电信更多>>
相关期刊：《Regenerative Biomaterials》《Chemical Research in Chinese Universities》《Nanotechnology and Precision Engineering》《Microsystems & Nanoengineering》更多>>
相关基金：国家自然科学基金广东省自然科学基金更多>>
-
在结果中检索

检索结果分析

结果分析中...
选择条件：
  • 期刊=Light（Science & Applications）x
共 条 记 录，以下是1-1
全选清除导出
参考文献引证文献引用追踪
视图：
排序：
Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure被引量：3
《Light(Science & Applications)》2022年第5期832-841,共10页Zhuofei Gan Hongtao Feng Liyang Chen Siyi Min Chuwei Liang Menghong Xu Zijie Jiang Zhao Sun Chuying Sun Dehu Cui Wen-Di Li 
partially supported by the Research Grants Council of the Hong Kong Special Administrative Region(Awards no.17207419,17209320,C7018-20G,and AoE/P-701/20);the Platform Technology Funding program,and the Seed Funding Program for Basic Research(202011159235 and 202010160046);the University of Hong Kong,and Shenzhen Government(Grant no.K20799112).
Functional nanostructures are exploited for a variety of cutting-edge fields including plasmonics,metasurfaces,and biosensors,just to name a few.Some applications require nanostructures with uniform feature sizes whil...
关键词：LITHOGRAPHY DIMENSIONS spatially 
全选清除导出
共1页<1>
检索报告 对象比较 聚类工具 使用帮助 返回顶部