NANOPATTERN

作品数：10被引量：6H指数：2
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相关期刊：《Regenerative Biomaterials》《Chemical Research in Chinese Universities》《Nanotechnology and Precision Engineering》《Microsystems & Nanoengineering》更多>>
相关基金：国家自然科学基金广东省自然科学基金更多>>
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Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification
《Microsystems & Nanoengineering》2024年第1期335-344,共10页Berke Erbas Ana Conde-Rubio Xia Liu Joffrey Pernollet Zhenyu Wang Arnaud Bertsch Marcos Penedo Georg Fantner Mitali Banerjee Andras Kis Giovanni Boero Juergen Brugger 
funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation program(Project MEMS4.0,ERC-2016-ADG,grant agreement No.742685);the EU’s H2020 framework program for research and innovation under grant agreement n.101007417,NFFA-Europe Pilot Project.M.B.acknowledges the support of SNSF Eccellenza grant No.PCEGP2_194528;support from the QuantERA II Programme that has received funding from the European Union’s Horizon 2020 research and innovation program under Grant Agreement No 101017733;G.F.and M.P.received funding through the European research council H2020-UE Framework Programme for Research&Innovation(2014-2020);ERC-2017-CoG;InCell;Project number 773091,and the Swiss National Science Foundation through grant 200021_182562.
Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics.Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertic...
关键词：LITHOGRAPHY THERMAL pattern 
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