supported by the National Natural Science Foundation of China(NSFC,Nos.22175195,22075311 and 21975278).
Comprehensive Summary,Low dielectric(low-k)organosilicon polymers have received extensive interests from industry and academia due to good electrical insulation,high temperature resistance,flame retardancy and hydroph...
financially supported by the National Natural Science Foundation of China(Nos.90606011, 50472038 and 2097401);PhD Program Foundation of Ministry of Education of China(No.20070255012);Shanghai Leading Academic Discipline Project(No.B603);Open Project of The State Key Laboratory of Crystal Materials(KF0809);the Program of Introducing Talents of Discipline to Universities(No.111-2-04);Doctoral Dissertation Innovation Project(No.BC200907)
Low-dielectric-constant poly(acetoxystyrenezhi-co-octavinyl-polyhedral oligomeric silsesquioxane)(PAS-POSS) organicinorganic hybrid nanocomposite was successfully synthesized via one-step free radical polymerization a...
supported by the Key Laboratory Foundation of Electron Devices Reliability Physics and Applications(No.51433020205DZ01);the Xi'an Applied Materials Innovation Fund(No.XA-AM-200501)
Fluorinated amorphous carbon (a-C:F) films were deposited at room temperature using C4Fs and CH4 as precursor gases by electron cyclotron resonance chemical vapour deposition (ECR-CVD). Chemical structures were a...
Supported partially by the National Natural Science Foundation of China under Grant No 60476011.
Two kinds of Cu diffusion barrier layers, sealed films and capped films, on nanoporous low-dielectric-constant films are investigated by positronium annihilation lifetime spectroscopy (PALS). We have found that the ...