ULTRA-PRECISION

作品数：45被引量：128H指数：5
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相关领域：金属学及工艺更多>>
相关作者：张金龙余玲玲刘京南孙薇刘玉岭更多>>
相关机构：东南大学天津职业技术师范大学河北工业大学南京理工大学更多>>
相关期刊：《Optoelectronics Letters》《武汉理工大学学报》《Frontiers of Mechanical Engineering》《Science China(Technological Sciences)》更多>>
相关基金：国家自然科学基金国家教育部博士点基金国家重点基础研究发展计划国家高技术研究发展计划更多>>
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Improving machinability and inhibiting surface damage of SiC wafer by ion implantation modification
《Chinese Journal of Aeronautics》2025年第3期544-559,共16页Qiang KANG Xianguang KONG Jiantao CHANG Xudong FANG Chen WU Changsheng LI 
support from the China Postdoctoral Science Foundation(No.2023M742735);the Postdoctoral Fellowship Program of CPSF,China(No.GZC20232029);the National Natural Science Foundation of China(No.52475530);the Shaanxi Postdoctoral Science Foundation,China(No.2023BSHEDZZ175);the Innovation Capability Support Program of Shaanxi Province,China(No.2021TD-23);the Key Industrial Chain Core Technology Research Project in Xi’an,China(No.23LLRH0029);the Natural Science Basic Research Program of Shaanxi,China(No.2024JC-YBQN-0490);the Fundamental Research Funds for the Central Universities,China(No.ZYTS24023).
Silicon Carbide (SiC) wafers have been widely used in micro- and nano-devices due to their excellent optical and material properties. However, polishing SiC wafers has been challenging and inefficient, tending to caus...
关键词：Ultra-precision polishing Ion implantation Material modification Orthogonal experiment Subsurface damage 
Studying mechanism of anisotropic crack generation on C-,R-,A-,and M-planes of sapphire during ultra-precision orthogonal cutting using a visualized slip/fracture activation model
《Nanotechnology and Precision Engineering》2024年第4期47-64,共18页Suk Bum Kwon Sangkee Min 
supported by the National Science Foundation under Grant No.CMMI-1844821;supported by the NSF through the University of Wisconsin Materials Research Science Center(Grant No.DMR-1720415).
With the growing demand for the fabrication of microminiaturized components,a comprehensive understanding of material removal behavior during ultra-precision cutting has become increasingly significant.Single-crystal ...
关键词：Anisotropic behavior Crack morphology Slip/fracture activation model Single-crystal sapphire Ultra-precision machining 
Study on 6-DOF active vibration-isolation system of the ultra-precision turning lathe based on GA-BP-PID control for dynamic loads被引量：1
《Advances in Manufacturing》2024年第1期33-60,共28页Bo Wang Zhong Jiang Pei-Da Hu 
supported by the National Natural Science Foundation of China(Grant Nos.62073184,52105490).
The vibration disturbance from an external environment affects the machining accuracy of ultra-precision machining equipment.Most active vibration-isolation systems(AVIS)have been developed based on static loads.When ...
关键词：Ultra-precision diamond turning lathe Active vibration isolation Six degrees of freedom Dynamic load Genetic algorithm-back propagation neural network-PID(GA-BP-PID)control 
Numerical simulation of materials-oriented ultra-precision diamond cutting:review and outlook被引量：3
《International Journal of Extreme Manufacturing》2023年第2期1-21,共21页Liang Zhao Junjie Zhang Jianguo Zhang Houfu Dai Alexander Hartmaier Tao Sun 
support from the National Natural Science Foundation of China(52275416 and 51905194);National Key Research and Development Program(2021YFC2202303);Science Challenge Project(No.TZ2018006-0201-02)。
Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on c...
关键词：diamond cutting ultra-smooth surface material-oriented physics-based simulation model molecular dynamics finite element 
High-speed atomic force microscopy in ultra-precision surface machining and measurement:challenges,solutions and opportunities
《Surface Science and Technology》2023年第1期113-134,共22页Chen Yang Chao-Qun Dang Wu-Le Zhu Bing-Feng Ju 
The atomic force microscope(AFM)possesses a unique capability for three-dimensional,high-resolution imaging down to the atomic level.It operates without the needs of additional requirements on sample material and envi...
关键词：High-speed atomic force microscopy Ultra-precision surface machining High-throughput metrology Nanofabrication 
Harmonizing Timekeepers over Long-Distance with Ultra-Precision
《Bulletin of the Chinese Academy of Sciences》2022年第4期220-220,共1页YAN Fusheng 
On October 5,2022,a research team led by Prof.PAN Jianwei and his colleagues from the University of Science and Technology of China(USTC)reported free-space dissemination of time and frequency with 10-19 instability o...
关键词：JOURNAL entitled keeping 
Long-term ultra-precision phase synchronization technique for locking the repetition rate of OFCs based on FLOM-PD被引量：1
《Optoelectronics Letters》2022年第12期712-716,共5页ZHOU Weifeng HAO Shijie CHEN Xing ZHANG Wanpeng YUE Zongjie WU Hong 
supported by the National Natural Science Foundation of China(No.U2031208)。
Long-term ultra-precision synchronization between optical frequency combs(OFCs) and microwave oscillators is important for various fields, including scientific observation, smart grid, positioning and navigation, etc....
关键词：SYNCHRONIZATION REPETITION phase 
Relationship between dynamic characteristics of air film of aerostatic spindle and mid-frequency of surface topography
《Advances in Manufacturing》2022年第3期428-442,共15页Dong-Ju Chen Shu-Pei Li Xuan Zhang Jin-Wei Fan 
funded by the National Natural Science Foundation of China(Grant Nos.51875005 and 51475010);the National Science and Technology Major Project of China(Grant No.2016ZX04003001).
The dynamic characteristics of the gas film of an aerostatic spindle primary affect workpiece waviness in ultra-precision machining.To improve the machining accuracy of the machine tool and provide a firm theoretical ...
关键词：Dynamic characteristics Aerostatic spindle Surface formation Ultra-precision flying cutting 
Research on Ultra-precision Machining Technology of Single Crystal Silicon Wafers
《外文科技期刊数据库(文摘版)工程技术》2022年第7期153-156,共4页XUQin PANJinping 
Integrated circuit IC is the cornerstone of todays information industry and information technology. CI technology is a key technology to promote Chinas economic and social development, and is the key to the transforma...
关键词：single crystal silicon wafer ultra-precision machining Analysis of the Preparation Process of Silic 
Nanostructured grinding wheels for ultra-precision engineering applications被引量：1
《Nanotechnology and Precision Engineering》2021年第3期63-75,共13页M.J.Jackson 
The author thanks Dr. Subramanian, STIMS Institute (Fig. 1);Dr. Michael Hitchiner of Saint-Gobain Abrasives (Figs. 13-16);Drs. Bhateja and Lindsay of Saint-Gobain Abrasives and SME(Figs. 2 and 3).
Manufacturers face challenges when dealing with abrasives that lose roundness,wear excessively,and suffer from pitting of the surface of the grinding wheel that needs rectification using dressing techniques.Nanostruct...
关键词：NANOTECHNOLOGY ABRASIVES Alloys FINISHING GRINDING Machining 
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