MICROMIRROR

作品数：19被引量：30H指数：4
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相关领域：机械工程更多>>
相关作者：尹冬青闫桂珍陈庆华陈章渊徐安士更多>>
相关机构：北京大学更多>>
相关期刊：《Control Theory and Technology》《Microsystems & Nanoengineering》《Journal of Mechanics Engineering and Automation》《Semiconductor Photonics and Technology》更多>>
相关基金：国家自然科学基金上海市浦江人才计划项目北京市自然科学基金国家教育部博士点基金更多>>
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A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors
《Microsystems & Nanoengineering》2024年第3期169-180,共12页Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu 
supported by the National Natural Science Foundation of China(51975483);Key Research Projects of Shaanxi Province(2020ZDLGY01-03);Natural Science Foundation of Ningbo Municipality(202003N4033).
As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many fields.However,two crucial challenges exist in the...
关键词：MIRROR exceptional anodic 
A robust lateral shift free(LSF)electrothermal micromirror with flexible multimorph beams被引量：1
《Microsystems & Nanoengineering》2023年第4期303-314,共12页Hengzhang Yang Anrun Ren Yingtao Ding Lei Xiao Teng Pan Yangyang Yan Wenlong Jiao Huikai Xie 
The authors would like to acknowledge the help of the staff from the Center of Nanofabrication,Tsinghua University for device fabrication.
Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide(SiO_(2))as the electrothermal isolation material.However,due to the brittle nature of SiO_(2),such micromirrors may be incap...
关键词：MIRROR ACCELERATION replace 
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