SCATTEROMETRY

作品数：5被引量：13H指数：2
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Solving the inverse grating problem by white light interference Fourier scatterometry被引量：8
《Light(Science & Applications)》2012年第1期17-23,共7页Valeriano Ferreras Paz Sandy Peterhansel Karsten Frenner Wolfgang Osten 
We are thankful for the technical support given by Thomas Schoder.This work was supported by the German DFG-funded priority program(SPP1327)on‘Optically generated sub-100 nm structures for technical and bio-medical applications’within the subproject‘Development of a functional sub-100 nm 3D two-photon polymerization technique and optical characterization methods’and the DFG project‘Inverse-source and inverse-diffraction problems in photonics(OS111/32-1).’。
Scatterometry is a well-established,fast and precise optical metrology method used for the characterization of sub-lambda periodic features.The Fourier scatterometry method,by analyzing the Fourier plane,makes it poss...
关键词：Fourier scatterometry inverse problem optical sub-lambda metrology RCWA white light interference 
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