supported by China Postdoctoral Science Foundation Funded Project (Nos. 20100481209 and 201104569);a Grant (20120101220) from Liaoning Province of China;a Grant (F11-264-1-74) from Shenyang City of China;supported by the Fundamental Research Funds for the Central Universities, China (No. N110403002)
In this work, diamond-like-carbon (DLC) films were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced cheraical vapor deposition (RF PECVD), and silicon films were prepared between D...