MICRO-HOTPLATE

作品数：4被引量：2H指数：1
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相关领域：自动化与计算机技术更多>>
相关期刊：《Journal of Donghua University(English Edition)》《Journal of Electronics(China)》《Journal of Semiconductors》更多>>
相关基金：国家自然科学基金国家高技术研究发展计划更多>>
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Analytical Research of Temperature Distribution and Thermal Stresses within Circular Micro-hotplates
《Journal of Donghua University(English Edition)》2016年第6期997-1006,共10页YU Hui-li LI Xu-quan HU Song-tao 
Micro-hotplate （MHP） technology is one key part in the manufacturing of gas sensors. The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scie...
关键词：micro-hotplate （MHP） temperature distribution thermal analysis： yon Mises stress： analytical solutions： numerical solution 
A NOVEL MICRO-PELLISTOR BASED ON NANOPOROUS ALUMINA BEAM SUPPORT被引量：1
《Journal of Electronics(China)》2012年第5期469-472,共4页Chen Qingyong Dong Hanpeng Xia Shanhong 
Supported by the State Hi-tech Research and Development Program (863 Program) of China (No. 2006AA040-101)
The traditional design of the catalytic combustion gas sensor in Micro ElectroMechanical Systems (MEMS) micro-hotplate employs a Pt resistive track as the micro-heater. The realized structure and fabrication are the k...
关键词：MICRO-HOTPLATE Pellistor Gas sensor 
System on chip thermal vacuum sensor based on standard CMOS process
《Journal of Semiconductors》2009年第3期104-108,共5页李金凤 唐祯安 汪家奇 
supported by the National Natural Science Foundation of China (No. 90607003).
An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate （MHP） and had been integrated with a rail to rail operat...
关键词：MICRO-HOTPLATE thermal vacuum sensor MONOLITHIC operational amplifier SAR ADC 
Temperature measurement based on radialization power for micro-hotplate被引量：1
《中国有色金属学会会刊：英文版》2006年第B02期780-784,共5页张彤 漆奇 刘奎学 刘丽 张蕾 徐宝琨 
Project (60104006) supported by the National Natural Science Foundation of China Project(20030322) supported by the Science Technology Office of Jilin Province
A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing...
关键词：气体传感器 微型热盘 辐射功率 温度测量 热分布 
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