POLISHING

作品数：210被引量：349H指数：10
导出分析报告
相关领域：金属学及工艺更多>>
相关作者：辛企明康仁科霍凤伟金洙吉赵福令更多>>
相关机构：大连理工大学东华大学北京理工大学南昌大学更多>>
相关期刊：更多>>
相关基金：国家自然科学基金国家重点基础研究发展计划广东省自然科学基金河北省自然科学基金更多>>
-
在结果中检索

检索结果分析

结果分析中...
选择条件：
  • 期刊=Journal of Materials Science & Technologyx
共 条 记 录，以下是1-4
全选清除导出
参考文献引证文献引用追踪
视图：
排序：
Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC被引量：1
《Journal of Materials Science & Technology》2024年第17期235-244,共10页Yuhang Li Zhe Zhang Qi Song Haiyan Shi Yu Hou Song Yue Ran Wang Shunshuo Cai Zichen Zhang 
supported by National Natural Science Foundation of China(No.62304249);a project funded by China Postdoctoral Science Foundation(No.2023M733704).
Slicing and post-treatment of SiC crystals have been a significant challenge in the integrated circuit and microelectronics industry.To compete with wire-sawing and mechanical grinding technology,a promis-ing approach...
关键词：Laser polishing Silicon carbide Internal modification Laser slicing Surface quality Microstructure 
Removal Behaviors of Different SiC Ceramics during Polishing被引量：4
《Journal of Materials Science & Technology》2010年第2期125-130,共6页Guiling Liu, Zhengren Huang , Xuejian Liu and Dongliang Jiang Structural Ceramics Center, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China 
supported by the Chinese National Defense Basic Research Project and the Innovation Project of Shanghai Institute of Ceramics,Chinese Academy of Sciences
Comparative experiments were conducted to reveal the removal behaviors of three kinds of silicon carbide （SIC） ceramics during polishing and the effects of ceramic microstructure on the surface quality were also rep...
关键词：SIC Surface quality Removal behavior POLISHING 
Optimization of Polishing Parameters with Taguchi Method for LBO Crystal in CMP被引量：4
《Journal of Materials Science & Technology》2009年第5期703-707,共5页Jun Li Yongwei Zhu Dunwen Zuo Yong Zhu Chuangtian Chen 
supported by the National Natural Science Foundation of China(No.50675104 and 50905086);Six High Talent Fund of Jiangsu Province(No.06-D-024);Talent Fund of NUAA(No.S0782-052)
Chemical mechanical polishing （CMP） was used to polish Lithium triborate （LiB3O5 or LBO） crystal. Taguchi method was applied for optimization of the polishing parameters. Material removal rate （MRR） and surface ...
关键词：Chemical mechanical polishing （CMP） Lithium triborate （LBO） crystal Material removal rate （MRR） Surface roughness Taguchi method 
Fabrication and Characterization of FeNiCr Matrix-TiC Composite for Polishing CVD Diamond Film被引量：3
《Journal of Materials Science & Technology》2009年第3期319-324,共6页Zhuji Jin Zewei Yuan Renke Kang Boxian Dong 
supported by the National Natural Science Foundation of China under grant No. 50575034.
Dynamic friction polishing （DFP） is one of the most promising methods appropriate for polishing CVD diamond film with high efficiency and low cost. By this method CVD diamond film is polished through being simply pr...
关键词：CVD diamond film FeNiCr matrix-TiC composite Spark plasma sintering Mechanical alloying 
全选清除导出
共1页<1>
检索报告 对象比较 聚类工具 使用帮助 返回顶部