PIEZORESISTOR

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相关作者：王家畴荣伟彬李欣昕孙立宁更多>>
相关机构：哈尔滨工业大学中国科学院更多>>
相关期刊：《Journal of Wuhan University of Technology(Materials Science)》《Nano-Micro Letters》《Microsystems & Nanoengineering》《Journal of Semiconductors》更多>>
相关基金：长江学者和创新团队发展计划国家高技术研究发展计划国家杰出青年科学基金更多>>
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SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
《Microsystems & Nanoengineering》2022年第1期269-280,共12页Jongmoon Jang Giulia Panusa Giovanni Boero Juergen Brugger 
The authors thank the Center of Micro/Nanotechnology(CMi)of EPFL for the microelectromechanical system(MEMS)fabrication support and Bio-Micro Robotics laboratory with Professor Hongsoo Choi of DGIST for the microforce probe system facility support.This work received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation program(Project“MEMS 4.0”,ERC-2016-ADG,Grant Agreement No.742683);the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(No.2020R1F1A107422211).
Glass-like carbon(GC)is a nongraphitizing material composed entirely of carbon atoms produced from selected organic polymer resins by controlled pyrolysis in an inert atmosphere.The GC properties are a combination of ...
关键词：CANTILEVER GLASS CARBON 
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