PIEZORESISTOR

作品数：4被引量：0H指数：0
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相关作者：王家畴荣伟彬李欣昕孙立宁更多>>
相关机构：哈尔滨工业大学中国科学院更多>>
相关期刊：《Journal of Wuhan University of Technology(Materials Science)》《Nano-Micro Letters》《Microsystems & Nanoengineering》《Journal of Semiconductors》更多>>
相关基金：长江学者和创新团队发展计划国家高技术研究发展计划国家杰出青年科学基金更多>>
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SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
《Microsystems & Nanoengineering》2022年第1期269-280,共12页Jongmoon Jang Giulia Panusa Giovanni Boero Juergen Brugger 
The authors thank the Center of Micro/Nanotechnology(CMi)of EPFL for the microelectromechanical system(MEMS)fabrication support and Bio-Micro Robotics laboratory with Professor Hongsoo Choi of DGIST for the microforce probe system facility support.This work received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation program(Project“MEMS 4.0”,ERC-2016-ADG,Grant Agreement No.742683);the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(No.2020R1F1A107422211).
Glass-like carbon(GC)is a nongraphitizing material composed entirely of carbon atoms produced from selected organic polymer resins by controlled pyrolysis in an inert atmosphere.The GC properties are a combination of ...
关键词：CANTILEVER GLASS CARBON 
A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
《Nano-Micro Letters》2018年第2期198-238,共41页Ribu Mathew A.Ravi Sankar 
In the last decade, microelectromechanical systems(MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications,especial...
关键词：SU-8 polymer Surface stress Biological sensor CANTILEVER Chemical sensor PIEZORESISTOR IMMOBILIZATION 
Development of Integrated Micro Nano-positioning xy-stage based on Bulk Micro-machining
《Journal of Wuhan University of Technology(Materials Science)》2009年第S1期195-199,共5页王家畴 
Funded by the High Technology Research and Development Programme of China (2007AA04Z315)
For operation and manipulation with nanometric positioning precision,an integrated micro nano-positioning xy-stage is developed,which is mainly composed of a silicon-based xy-stage,comb-driven actuator and displacemen...
关键词：MEMS silicon integrated xy-stage comb-driven actuator vertical sidewall surface piezoresistor 
A Silicon Integrated Micro Positioning xy-Stage for Nano-Manipulation
《Journal of Semiconductors》2008年第10期1932-1938,共7页王家畴 荣伟彬 孙立宁 李欣昕 
国家杰出青年基金(批准号:50725518);国家高技术研究发展计划(批准号:2007AA04Z315);长江学者和创新团队发展计划资助项目~~
An integrated micro positioning xy-stage with a 2mm × 2mm-area shuttle is fabricated for application in nano- meter-scale operation and nanometric positioning precision. It is mainly composed of a silicon-based xy-st...
关键词：MEMS integrated micro xy-stage electrostatics comb actuator vertical sidewall surface piezoresistor inplane 
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