GYROSCOPES

作品数：41被引量：126H指数：5
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相关领域：电子电信更多>>
相关作者：陆恺陈家斌更多>>
相关机构：北京理工大学更多>>
相关期刊：《Microsystems & Nanoengineering》《Journal of Semiconductors》《Frontiers of Optoelectronics》《Satellite Navigation》更多>>
相关基金：国家自然科学基金国家重点基础研究发展计划国家教育部博士点基金重庆市自然科学基金更多>>
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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
《Microsystems & Nanoengineering》2023年第1期149-159,共11页Zhenming Liu Haoran Wen Farrokh Ayazi 
supported by the Army Research Lab under Contract W911NF20C0019.
In this paper,a modification to the eigenmode operation of resonant gyroscopes is introduced.The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections,...
关键词：mode loop operations 
Eigenmode operation of piezoelectric resonant gyroscopes被引量：3
《Microsystems & Nanoengineering》2020年第1期95-105,共11页Mojtaba Hodjat-Shamami Farrokh Ayazi 
This work was supported in part by the DARPA Microsystems Technology Office Single-Chip Timing and Inertial Measurement Unit(TIMU)program through SSC Pacific contract#N66001-11-C-4176。
The theory of eigenmode operation of Coriolis vibratory gyroscopes and its implementation on a thin-film piezoelectric gyroscope is presented.It is shown analytically that the modal alignment of resonant gyroscopes ca...
关键词：POLARIZATION PIEZOELECTRIC MODE 
Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes:Breaking the barrier toward high-performance monolithic inertial measurement units被引量：4
《Microsystems & Nanoengineering》2017年第1期332-340,共9页Haoran Wen Anosh Daruwalla Farrokh Ayazi 
This work is supported by the DARPA MTO,Single-Chip Timing and Inertial Measurement Unit(TIMU)program under contract#N66001-11-C-4176.
This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep react...
关键词：anisotropic wet etching MEMS resonant pitch/roll gyroscope quadrature cancellation slanted electrode 
Substrate-decoupled,bulk-acoustic wave gyroscopes:Design and evaluation of next-generation environmentally robust devices被引量：3
《Microsystems & Nanoengineering》2016年第1期239-248,共10页Diego E.Serrano Mohammad F.Zaman Amir Rahafrooz Peter Hrudey Ron Lipka Duane Younkin Shin Nagpal Ijaz Jafri Farrokh Ayazi 
This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is use...
关键词：Bulk-acoustic wave environmental stability MEMS gyroscope support loss vibration rejection 
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