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Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes被引量：2
《Nano-Micro Letters》2022年第2期60-78,共19页Hyeonhee Roh Young Jun Yoon Jin Soo Park Dong-Hyun Kang Seung Min Kwak Byung Chul Lee Maesoon Im 
This work was supported by KIST(Korea Institute of Science and Technology)institutional grants(2E30965,and 2V07360);the National R&D Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Science and ICT(Nos.2020R1C1C1006065,2021M3F3A2A01037366);This work was also supported by the Korea Medical Device Development Fund grant funded by the Korea government(the Ministry of Science and ICT,the Ministry of Trade,Industry and Energy,the Ministry of Health&Welfare;the Ministry of Food and Drug Safety)(Project Number:9991006818,KMDF_PR_20200901_0145-2021).
Out-of-plane microneedle structures are widely used in various applications such as transcutaneous drug delivery and neural signal recording for brain machine interface.This work presents a novel but simple method to ...
关键词：MICRONEEDLE Various heights Cross-sectional shapes Isotropic etch Deep reactive ion etching 
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