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Effect of internal structure of a batch-processing wet-etch reactor on fluid flow and heat transfer
《Chinese Journal of Chemical Engineering》2024年第8期177-186,共10页Qinghang Deng Junqi Weng Lei Zhou Guanghua Ye Xinggui Zhou 
financially supported by the National Natural Science Foundation of China(22378115 and 22078090);the Shanghai Rising-Star Program(21QA1402000);the Natural Science Foundation of Shanghai(21ZR1418100);the Fundamental Research Funds for the Central Universities(JKA01231803)。
Batch-processing wet-etch reactors are the key equipment widely used in chip fabrication,and their performance is largely affected by the internal structure.This work develops a three-dimensional computational fluid d...
关键词：Wet-etch reactor Batch-processing Computational fluid dynamics Reaction heat Internal structure Etch uniformity 
Cost-effective fabrication of liquid metals via a laser induced graphene stamp for highly-stretchable integrated optoelectronics
《Nano Research》2024年第8期7603-7613,共11页Weiqi Sun Li Xiang Zebang Luo Hui Wang Dong Li Anlian Pan 
supported by the National Natural Science Foundation of China(Nos.62101181,2221001,62090035,52372146,U22A20138,and U19A2090);the National Key Research and Development Program(Nos.2022YFA1204300 and 2022YFA1402501);Natural Science Foundation of Hunan Province(No.2023JJ20016);the Key Program of Science and Technology Department of Hunan Province(Nos.2019XK2001 and 2020XK2001);the Key Research and Development Plan of Hunan Province(No.2023GK2012);the Science and Technology Innovation Program of Hunan Province(No.2021RC3061);the Open Project Program of Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences(No.22ZS01).
Stretchable electronics have found widespread applications in various fields such as wearable electronics,soft robots,and bioelectronics.As an important promising alternative of traditional rigid conductors,liquid met...
关键词：liquid metal WETTABILITY selective adhesion transfer printing stretchable electronics 
Decohesion of graphene from a uniaxially-stretched substrate:Failure analysis of a frictional adhesive interface
《Friction》2024年第3期510-521,共12页Bo PENG Chaochen XU Qingao WANG Pei ZHAO Xiqiao FENG Qunyang LI 
the National Natural Science Foundation of China(Nos.12025203,11921002,and 11890671);the National Key R&D Program of China(No.2022YFF0706100);the Initiative Program of State Key Laboratory of Tribology in Advanced Equipment(No.SKLT2022A01).
Composite structures consisting of two-dimensional(2D)materials deposited on elastic substrates have a wide range of potential applications in flexible electronics.For such devices,robust 2D film/substrate interfacial...
关键词：film/substrate systems adhesion frictional sliding interface decohesion cohesive-zone model 
Solution process formation of high performance,stable nanostructured transparent metal electrodes via displacement-diffusion-etch process被引量：1
《npj Flexible Electronics》2022年第1期20-27,共8页Yaokang Zhang Xuyun Guo Jiaming Huang Zhiwei Ren Hong Hu Peng Li Xi Lu Zhongwei Wu Ting Xiao Ye Zhu Gang Li Zijian Zheng 
The authors acknowledge the Research Grant Council of Hong Kong (15304919,15218517,C5037-18G);the Hong Kong Polytechnic University (ZVRP,8-8408,1-CDA5);Shenzhen Science and Technology Innovation Commission (JCYJ20200109105003940);the National Natural Science Foundation of China (51961165102);Guangdong-Hong Kong-Macao Joint Laboratory for PhotonicThermal-Electrical Energy Materials and Devices (GDSTC No.2019B121205001).
Transparent electrodes(TEs)with high chemical stability and excellent flexibility are critical for flexible optoelectronic devices,such as photodetectors,solar cells,and light-emitting diodes.Ultrathin metal electrode...
关键词：TRANSPARENT DISPLACEMENT DIFFUSION 
Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes被引量：2
《Nano-Micro Letters》2022年第2期60-78,共19页Hyeonhee Roh Young Jun Yoon Jin Soo Park Dong-Hyun Kang Seung Min Kwak Byung Chul Lee Maesoon Im 
This work was supported by KIST(Korea Institute of Science and Technology)institutional grants(2E30965,and 2V07360);the National R&D Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Science and ICT(Nos.2020R1C1C1006065,2021M3F3A2A01037366);This work was also supported by the Korea Medical Device Development Fund grant funded by the Korea government(the Ministry of Science and ICT,the Ministry of Trade,Industry and Energy,the Ministry of Health&Welfare;the Ministry of Food and Drug Safety)(Project Number:9991006818,KMDF_PR_20200901_0145-2021).
Out-of-plane microneedle structures are widely used in various applications such as transcutaneous drug delivery and neural signal recording for brain machine interface.This work presents a novel but simple method to ...
关键词：MICRONEEDLE Various heights Cross-sectional shapes Isotropic etch Deep reactive ion etching 
Removal of GaN film over AlGaN with inductively coupled BCl_(3)/Ar atomic layer etch
《Chinese Physics B》2022年第1期613-617,共5页Jia-Le Tang Chao Liu 
the National Foreign Experts Bureau High-end Foreign Experts Project,China(Grant No.G20190114003);the Key Research and Development Program of Jiangsu Province,China(Grant No.BE2018063);the Natural Science Research Projects of Colleges and Universities in Jiangsu Province,China(Grant No.19KJD140002);the Scientific Research Program for Doctoral Teachers of JSNU,China(Grant No.9212218113).
Atomic layer etching(ALE)of thin film GaN(0001)is reported in detail using sequential surface modification by BCl_(3) adsorption and removal of the modified surface layer by low energy Ar plasma exposure in a reactive...
关键词：atomic layer etch GaN high electron mobility transistor 
Effect of oxygen terminated surface of boron-doped diamond thin-film electrode on seawater salinity sensing
《Journal of Materials Science & Technology》2021年第27期1-10,共10页Dan Shi Lusheng Liu Zhaofeng Zhai Bin Chen Zhigang Lu Chuyan Zhang Ziyao Yuan Meiqi Zhou Bing Yang Nan Huang Xin jiang 
financially supported by the Joint Research Fund Liaoning-Shenyang National Laboratory for Materials Science(No.20180510009);the Young Talent Program of Shenyang National Laboratory for Materials Science(No.L2019F39);the National Natural Science Foundation of China(No.51202257)。
Tremendous demands for highly sensitive and stable seawater salinometers have motivated intensive research on advanced electrode materials.Boron-doped diamond(BDD)is attractive in terms of its high mechanical stabilit...
关键词：Boron-doped diamond CAPACITANCE Oxygen plasma Reactive ion etch Seawater salinity 
The investigation of DARC etch back in DRAM capacitor oxide mask opening被引量：1
《Journal of Semiconductors》2021年第7期88-92,共5页Jianqiu Hou Zengwen Hu Kuowen Lai Yule Sun Bo Shao Chunyang Wang Xinran Liu Karson Liu 
Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon ox...
关键词：dynamic random access memory(DRAM) oxide mask open of capacitor capacitive coupled plasma(CCP)etch dielectric anti-reflective coating(DARC) etch back(EB) 
Interface and border trapping effects in normally-off Al2O3/AlGaN/GaN MOS-HEMTs with different post-etch surface treatments被引量：1
《Chinese Physics B》2020年第10期459-463,共5页Si-Qi Jing Xiao-Hua Ma Jie-Jie Zhu Xin-Chuang Zhang Si-Yu Liu Qing Zhu Yue Hao 
Project supported by the National Natural Science Foundation of China (Grant Nos. 61704124, 11690042, and 61634005).
Trapping effect in normally-off Al2O3/AlGaN/GaN metal–oxide–semiconductor (MOS) high-electron-mobility transistors (MOS-HEMTs) with post-etch surface treatment was studied in this paper. Diffusion-controlled interfa...
关键词：AlGaN/GaN MOS-HEMTs interface traps border traps photo-assisted C-V measurement 
Multiaxially-stretchable kirigami-patterned mesh design for graphene sensor devices被引量：5
《Nano Research》2020年第5期1406-1412,共7页Hyo Chan Lee Ezekiel YHsieh Keong Yong SungWoo Nam 
S.N.gratefully acknowledges support from the AFOSR(Nos.FA2386-17-l-4071,FA9550-18-1-0405);KRICT(No.GOIKRICT KK1963-807);NSF(Nos.ECCS-1935775,CMMI-1554019,MRSEC DMR-1720633);NASA ECF(No.NNX16AR56G);ONR YIP(No.N00014-17-1-2830)and JITRI.Experiments were carried out in part in the Materials Research Laboratory Central Research Facilities,and Micro and Nano Technology Laboratory at the University of Illinois at Urbana-Champaign.
In wearable electronics,significant research has gone into imparting stretchability and flexibility to otherwise rigid electronic components while maintaining their electrical properties.Thus far,this has been achieve...
关键词：kirigami MESH strain-insensitive WEARABLE GRAPHENE GLUCOSE 
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