基于Ppy敏感膜的pH-ISFET研制  

Development of pH-ISFETs with Ppy sensitive membrane

作　　者：汪祖民[1] 孙红光[1] 韩泾鸿[1] 边超[1] 陈绍凤[1] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《仪器仪表学报》2006年第z2期1065-1066,共2页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(90307014)

摘　　要：研制了一种采用0．35μm标准CMOS工艺制造的,集成ISFET／REFET及其信号处理电路于一体的集成化芯片系统(SOC)。其中ISFET敏感膜为采用电化学法制备的导电聚合物Ppy(Polypyrrole,聚吡咯),通过对各种条件的优化,最终得到了pH响应为56mV／pH的高灵敏度。Designed a system-on-chip (SOC) integrated with ISFET/REFET, quasi reference electrode, and their relative signals process circuits. The chip was realized with chartered semiconductor's 0. 35μm, 4-metal and 2-poly layer standard CMOS process, and the ISFET sensitive membrane material is Polypyrrole obtained by electrochemical polymerization processing. After optimizing the polymerization parameters, a high sensitivity of 56mV/pH was achieved.

关 键 词：离子敏场效应管 聚吡咯 敏感膜 集成化芯片系统 

分 类 号：TH7-55[机械工程—仪器科学与技术]