精密工作台扰动观测器的设计  

Design of Disturbance Observer for Ultra-precision Stages

作　　者：贾松涛[1] 朱煜[1] 杨开明[1] 李恒[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《微细加工技术》2007年第4期39-42,共4页Microfabrication Technology

基　　金：国家973重点基础研究项目资助(2004CB318007)

摘　　要：针对直线电机驱动、气浮导轨支撑的精密工作台没有阻尼、抗扰性能差的特点,为了抑制各种线缆扰动和直线电机推力波动的影响,提高工作台的定位精度、减小轨迹跟踪误差,采用扰动观测方法,基于直线电机精密工作台设计了前馈+反馈+扰动观测的控制器。详细讨论了扰动观测器的设计方法。实验结果表明,采用扰动观测器后,实现了±0.15μm的静态定位精度,以150 mm/s匀速运动时轨迹跟踪精度保持在±1.5μm的误差带范围内。扰动观测器能够有效地抑制低频噪声和克服参数变化的不利影响。The precision stage driven by a linear motor and sustained by air-bearing tracks has the characteristics of zero mechanical damping and poor anti-disturbance.A controller with feedforward,feedback and disturbance observer for the precision stage driven by a linear motor was designed by the method of disturbance observation to restrain the disturbance caused by cables on the stage and thrust fluctuation of the linear motor so that the position precision of the stage was enhanced and the trajectory following error was reduced,and the design project of the disturbance observer was discussed in detail.The experimental results indicate that the static position precision is in a range of ±0.15 μm and the following error can be controlled in a range of ±1.5 μm at the speed of 150 mm/s after the disturbance observer is employed.In summary,the disturbance observer can effectively restrain the influences of low-frequency noise and parameter fluctuation.

关 键 词：精密工作台 扰动观测器 气浮导轨 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]