MEMS技术制作的螺线管微电感  

Solenoid Microinductors Fabricated by MEMS Technology

作　　者：方东明[1] 周勇[1] 赵小林[1] 王西宁[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《微细加工技术》2006年第5期36-40,共5页Microfabrication Technology

基　　金：教育部科学技术研究重大项目资助(0307);上海-应用材料研究与发展基金资助项目(0515)

摘　　要：考虑和分析了螺线管微电感的几何结构参数对微电感性能的影响,利用MEMS技术制作了四种不同几何结构的高性能射频螺线管微电感。这些微电感采用铜线圈,以减小线圈寄生电阻,且制作工艺简单,成本低,与IC相兼容。测试结果表明,微电感在较宽的工作频率范围内具有较高的Q值,在频率分别为6 GHz,4.4 GHz,5.8 GHz和5.6 GHz,微电感Q峰值为38,19.1,24.1和21.9,所对应的电感量为1.81 nH,1.07 nH,1.03 nH和1.17 nH。Effects of the geometrical parameters on the performance of solenoid inductor were analyzed and the high-performance RF solenoid microinductors with four different geometrical parameters were fabricated using microelectromechanical systems (MEMS) technology. In these inductors, the electroplated copper coils are employed to reduce the series resistance. The fabrication process is simple, low cost and compatible with IC technology. The measurement results show that these inductors have high Q-factor in the wide range of operating frequency. The peak-Q of these inductors are 38, 19.1, 24.1 and 21.9 (6 GHz, 4.4 GHz, 5.8 GHz, 5.6 GHz) and the corresponding inductance are 1.81 nH, 1.07 nH, 1.03 nH and 1.17 nH at each peak-Q frequency, respectively.

关 键 词：螺线管电感 微机电系统 品质因素 射频 

分 类 号：TM55[电气工程—电器]