纳机电系统  

Nanoelectromechanical Systems

作　　者：胡小唐[1] 李源[1] 饶志军[1] 胡春光[1] 傅星[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《纳米技术与精密工程》2004年第1期1-7,共7页Nanotechnology and Precision Engineering

摘　　要：纳机电系统 (NEMS)是基于微机电系统发展起来的新兴技术领域 ,同时也是纳米技术的重要组成部分 .文中介绍了NEMS器件的微小尺寸、超高频率和超低能耗等重要特性 ,并列举了NEMS在生物、信息和纳米流体学等领域的应用 .最后讨论了NEMS在发展中遇到的问题和涉及到的关键技术 ,如微观效应的影响 ,NEMS加工技术 ,NEMS的设计、仿真和优化 ,NEMS器件的驱动与检测 ,NEMS器件与宏观世界的通讯等 .Nanoelectromechanical system (NEMS) is a prospective field of technology developed on the basis of micro electromechanical system, and is regarded as an essential aspect of nanotechnology. The important attributes of NEMS, such as ultra small dimension, ultra high frequency response, and ultra low power, are analyzed. Some typical applications of NEMS in biology, information, and nanofluid fields are presented. Finally, encountered challenges and involved key technologies in NEMS research, including microcosmic effect, NEMS machining technology, the design, simulation and optimization of NEMS,the drive and measurement of NEMS device, and the communication between NEMS device and macro cosmos, are discussed.

关 键 词：微机电系统 纳机电系统 纳米技术 NEMS 

分 类 号：TN42[电子电信—微电子学与固体电子学]