自敏感式SFM的研发及其在微小垂直面无损测量中的应用(英文)  

A Self-Sensitive SFM for Nondestructive Measurement of Tiny Vertical Surfaces with Restricted Access

作　　者：单学传 前田龙太郎[2] 小林健[2] 张国雄[3] 

机构地区：[1]新加坡精密加工技术研究所,新加坡638075 [2]日本产业技术综合研究所,日本3058564 [3]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《纳米技术与精密工程》2004年第1期32-37,共6页Nanotechnology and Precision Engineering

摘　　要：介绍了一种新颖的扫描原子力显微 (SFM )方法 ,它可用于微机械垂直面的无损测量 ,这是惯用的SFM和其他测量仪器无法实现的 .除操作灵活外 ,本方法使用自敏感微小悬臂结构确定其自身的偏移 .因此 ,这使得测量微小垂直镜面的反射面以及微模插入物内壁等微结构的特征时可以精确定位 .本方法已成功地应用于测量微模长方形腔体的内壁和热压聚合物微镜的反射面 ,该微镜的尺寸是 5 0 0 μm (长 )× 10 0 μm(宽 )× 2 0 0 μm (高 ) .This paper presents a novel scanning force microscope (SFM) for nondestructive measurement of tiny micromachined vertical surfaces, where conventional SFMs and other instruments cannot access without destruction. In addition to its access flexibility, the SFM uses a self sensitive cantilever for sensing its own deflection. As a result, it can access tiny areas at restricted locations for measuring the features of microstructures, such as the reflecting surfaces of a tiny vertical mirror and the inside walls of a micro mold insert. The SFM has been successfully used in evaluating the inner walls of rectangular cavities on a micro mold and the reflecting surfaces of embossed polymer mirrors with a dimension of 500 μm long×100 μm wide×200 μm deep (high).

关 键 词：自敏感悬臂 扫描原子力显微镜 无损测量 微镜 微模 微机械 

分 类 号：TH878[机械工程—仪器科学与技术]