从解析角度试论SEM分辨率  

Analytical Discussion of the Resolution of Scanning Electron Microscope

作　　者：汪滨[1] 

机构地区：[1]中国科学院北京科学仪器研制中心,北京100080

出　　处：《电子学报》1993年第9期82-86,共5页Acta Electronica Sinica

摘　　要：对于一个电子光学系统我们在考虑了各静电透镜和电磁透镜的球差、色差、衍射和高斯像斑之后。用解析的方法求出了上靶束径的条件极值,得到了最佳放大倍数和最佳孔径角的解析表达式,反过来这为完善该系统的设计提供了依据与途径。还证明了d作为a和M的函数在无条件限制下不存在最佳值。A probe diameter (d) is the function of aperture angle (a) and magnification (M),taking into account of a Gaussian probe,spherical,chromatic and diffraction aberrations of all lenses in a sysfem.With analytics,an equation for optimum α1 is derived to obtain the minimum probe diameter,when one of the two variables has been regarded as a constant We have also proved that d as a function of M and a has no extreme value if there is no any additional condition.

关 键 词：孔径角 扫描电镜 分辨率 解析法 

分 类 号：TN16[电子电信—物理电子学]