金刚石膜MEMS及其应用  

MEMS and its applications of diamond films

作　　者：崔玉亭[1] 

机构地区：[1]商丘师范学院物理系,河南商丘476000

出　　处：《微纳电子技术》2004年第7期27-30,共4页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50005027)

摘　　要：由于金刚石膜优异的力学、电学、热学及化学性质,使其成为MEMS中的微型传感器和微型结构的重要的首选材料。利用金刚石膜作为MEMS材料和各种微型机械的技术正在引起极大的兴趣。本文主要综述了金刚石MEMS器件的技术和应用。The excellent mechanical,electrical,thermal and chemical properties of diamond films make them a candidate material for micro sensors and microstructures to be used in the micro-electro-mechanical system(MEMS). Thus,there is a growing interest in utilizing CVD diamond films as a material in MEMS,and a variety of micro-machining technologies for diamond films have been developed. This paper reviews the techniques and applications of diamond MEMS devices.

关 键 词：金刚石膜 微机电系统 微型传感器 微型机械技术 化学汽相淀积 

分 类 号：TN304.18[电子电信—物理电子学]