自感知压电微夹钳研究  

Study of piezoelectric self-sensing microgripper

作　　者：庄乾霞[1] 孙宝元[1] 董维杰[2] 

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]大连理工大学电子与信息工程学院,辽宁大连116024

出　　处：《大连理工大学学报》2004年第6期819-823,共5页Journal of Dalian University of Technology

基　　金：国家自然科学基金资助项目(69774020);教育部博士学科点专项科研基金资助项目(98014106).

摘　　要：采用双晶片型压电悬臂梁制作一种双悬臂梁结构的微夹钳,可用于微操作系统中的微夹持器.在一般微操作系统中,需要外加微力传感器才能组成闭环控制系统,这必将影响夹钳的工作特性.为简化系统,借助于电荷提取电路提取压电双晶片上的电荷,并通过软件进行状态观测,可直接得到压电夹钳尖端上的夹持力,同时还能观测到夹钳尖端的位移,称其为自感知执行器.实验证明了上述自感知方法的有效性.The piezoelectric bimorphs of cantilever beams are used to fabricate a microgripper which is used in micromanipulation system. In general micromanipulation system, micro-force sensor is necessary to a close-loop feedback force control system, so the performance of microgripper is influenced. To make microgripper work without using extra sensor and simplify the system, by means of compound circuit used to get charge of piezoelectric bimorphs surfaces and measure of software observer, the tip output force and displacement are obtained. It is considered as self-sensing actuator. Experiments have proved the validity of the above self-sensing method.

关 键 词：微夹钳 压电 夹持力 力传感器 微操作系统 执行器 悬臂梁 自感 尖端 感知 

分 类 号：G633.7[文化科学—教育学] TH21[机械工程—机械制造及自动化]