脉冲真空弧源沉积类金刚石薄膜耐磨特性研究  

Tribological Properties Investigation of Diamond-like Carbon Films Synthesized by Pulsed Arc Plasma Deposition in Vacuum

作　　者：徐禄祥[1] 冷永祥[1] 孙永春[1] 龚发梅[1] 张琦[1] 杨萍[1] 黄楠[1] 

机构地区：[1]西南交通大学材料工程学院,生物材料与表面工程研究所,四川成都610031

出　　处：《真空科学与技术学报》2004年第5期363-366,371,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：本文利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(10 0 )基体上制备了类金刚石 (DLC)薄膜 ,研究在不同基体偏压下 ,DLC薄膜的结构与性能。采用拉曼光谱和X射线光电子能谱 (XPS)研究DLC薄膜的原子结合状态 ,利用CSEM销盘摩擦磨损试验机研究其耐磨性 ,利用HXD10 0 0B显微硬度仪测试其显微硬度 ,并采用压痕法评价其结合力。研究结果表明 :DLC薄膜与基体结合牢固。随着基体偏压的提高 ,DLC薄膜内sp3 键含量增大 ,薄膜硬度提高。Cr17Ni14Cu4不锈钢表面沉积DLC薄膜后 ,耐磨性大幅度提高 ,本文探讨了DLC薄膜的耐磨机理。Diamond-like carbon (DLC) films were grown on Cr17Ni14Cu4 stainless steel and Si(111) substrates by pulsed arc plasma deposition in vacuum.Its structures and tribological property were studied with Raman spectroscopy and X-ray photoelectron spectroscopy (XPS).The results show that the adhesion at the interface of DLC film and Cr17Ni14Cu4 stainless steel is very strong and that as the substrates bias voltage increases,the number of sp 3 bond in the film increases,but the effective micro-hardness increases but slowly.Possible mechanism responsible for the increase of wear resistance of DLC coated Cr17Ni14Cu4 stainless steel are also tentatively discussed.

关 键 词：DLC薄膜 类金刚石薄膜 原子 X射线光电子能谱(XPS) 脉冲 拉曼光谱 真空 薄膜硬度 基体 耐磨机理 

分 类 号：TB302.3[一般工业技术—材料科学与工程] O484[理学—固体物理]