应用最小二乘法完善质量流量计的工作曲线  

The Completing to the Operating Parameters of Mass Flow Controller by Least Squares

作　　者：王浩[1] 范广涵[1] 廖常俊[1] 周天明[1] 

机构地区：[1]华南师范大学材料科学与技术研究所,广州510631

出　　处：《仪器仪表学报》2004年第6期770-772,共3页Chinese Journal of Scientific Instrument

摘　　要：主要讲述应用最小二乘法分析拟合质量流量计 (MFC)的工作曲线 ,以完善流量计的使用操作参数。首先根据已有的工作曲线通过拟合找出设定流量 (msetting)—工作时间 (t)的变化规律 ,再根据此规律拟合找到流量计的设定流量 (m )—稳定时间(tsteady)曲线。By employing the least squares to analysis and simulate the command steps, the operating parameters of the mass flow controller(MFC) could be consummated. At first the relation between the setting flow and the lagged steady time could be found according to the supplied command steps by the simulation, then the relation between the flow and the working time could be generated. Finally the real set and control to MFC were performed.

关 键 词：质量流量计 工作曲线 设定 过拟合 参数 MFC 最小二乘法 稳定时间 工作时间 

分 类 号：TH814.6[机械工程—仪器科学与技术]