结构参数对Ba_(1-x)La_xTiO_3多功能传感器敏感特性的影响  

Structure Effects on Sensiti vity Performance of Multi-function Microsensor with Semiconducting Ba_(1-x)La_xTiO_3Film

作　　者：李斌[1] 李观启[1] 黄美浅[1] 刘玉荣[1] 陈平[1] 

机构地区：[1]华南理工大学物理科学与技术学院,广州510640

出　　处：《固体电子学研究与进展》2005年第1期138-141,共4页Research & Progress of SSE

摘　　要：对三种二氧化硅层厚度 (1 0 nm、2 5 nm、40 nm)的器件进行测试 ,研究二氧化硅层的厚度对 Ba1 - x Lax Ti O3多功能传感器敏感特性的影响。结果表明 ,对于 MIS电容传感器 ,氧化层越薄 ,湿敏灵敏度越高 ,湿滞越小 ;相反 ,对于薄膜电阻传感器 ,氧化层越厚 ,光敏灵敏度越高。总之 ,选择一个合适的氧化层厚度 ,器件可以同时具有较高的湿敏、光敏灵敏度。The effects of Si O 2 thickness on sensitivity performance of multi-function microsensor with semi conducting Ba 1-xLa xTiO 3fi lm on SiO 2/Si substrate are studied.Three ki nds of devices with different SiO 2 thic kness(10 nm?25 nm?40 nm)were fabricated. Experimental results reveal that for the MIS capacitor of the sensor,the thinner the oxide(SiO 2),the higher is the sens itivity to humidity,and the less is the hysteresis.On the contrary,for the film resistor of the sensor,the thinner the oxide,the lower is the sensitivity to li ght.On the other hand,the thermal proper ty is basically unaffected by the oxide thickness.In summary,with an optimal oxi de thickness,the device can be highly se nsitive to both light and humidity.

关 键 词：钛酸镧钡薄膜 湿敏 光敏 

分 类 号：TN379[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]