六维宏微位移可控精密工作台的研制  

Development of a 6-D macro-micro-displacement controllable precision operating stage

作　　者：施宁平[1] 凌宁[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《光电工程》2005年第3期82-84,92,共4页Opto-Electronic Engineering

基　　金：中国航天集团五院资源卫星 CCD 关键技术项目

摘　　要：研制了一种六维宏微位移可控精密工作台。设计中采用粗精分离的原则,有利于提高工作台的精度,并减小了研制难度。宏位移使用精密燕尾导轨结构。微定位系统使用了压电陶瓷驱动器、柔性铰链和计算机控制,使系统具有极高精度的补偿定位能力。该工作台可在 100mm 范围内运动,平移分辨力为 0.05μm,转动分辨力为 0.3″。A 6-D macro-micro-displacement controllable precision operating stage is developed. A coarse-fine separation rule is adopted for the design. This helps improving the accuracy of the operating stage and lowering the development difficulty. A precision dovetail groove guide is used for the macro-displacement. A PZT actuator and a flexible hinge are used in the micro-positioning system and the displacement is controlled with computer. In this way the system features a high accuracy and compensating positioning capability. The operating stage can move within a range of 100 mm. Its transition resolving power and rotating resolving power are 0.05 μm and 0.3, respectively.

关 键 词：精密工作台 控制系统 柔性铰链 压电陶瓷驱动器 

分 类 号：TH703.8[机械工程—仪器科学与技术]