准分子激光光束均匀技术  

Beam homogenizing technology for UV excimer laser

作　　者：叶震寰[1] 楼祺洪[1] 李红霞[1] 董景星[1] 魏运荣[1] 

机构地区：[1]中国科学院上海光学精密机械研究所

出　　处：《激光技术》2005年第2期207-209,212,共4页Laser Technology

基　　金：上海市科技发展基金资助项目(021111000)

摘　　要：由于放电结构及谐振腔的限制,准分子激光光斑呈现不均的分布。介绍了各种均匀器的工作原理,从衡量光束均匀性的各项指标出发,评述分析了各种均匀方法的优缺点及适用范围。Limited by characteristic discharging structure and os cillating cavity,the beam energy profile of the excimer laser appears asymmetri cally.The principles of various types of beam homogenizer,as well as specificat ions scaling the beam uniformity are presented.The pro-and-cons of these diffe rent technologies and their different valid applications are also discussed.

关 键 词：准分子激光 光束均匀 蝇眼 光刻 

分 类 号：TN248.2[电子电信—物理电子学]