微电铸及其在MEMS中的应用  

Theory and Application of Micro-electroforming in MEMS

作　　者：吕文龙[1] 陈义华[1] 孙道恒[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《厦门大学学报（自然科学版）》2005年第B06期316-318,共3页Journal of Xiamen University：Natural Science

基　　金：福建省自然科学基金(A0110003);福建省科技计划重点项目(2002H022)资助

摘　　要：研究了微电铸在MEMS结构层制造工艺中的可行性并搭建了微电铸实验系统,通过对不同Watts镍电解液的成分实验得到了一组性能较好的成分配比.通过晶种层材料的实验得出TiCu作为晶种层材料的优点.利用微电铸的方法制作出微机械隧道陀螺仪中的悬臂梁、挡板、驱动电极等,得到了一组比较有价值的电铸参数,并对电铸中存在的问题进行了阐述.实验结果表明,采用方波脉冲电铸能够得到晶粒粗细均匀、硬度和应力符合设计要求的悬臂梁等MEMS结构.The feasibility of Micro-electroforming on the fabrication of structural layer in MEMS was researched.An experimental system of Micro-electroforming was established.A appropriate kind of Watts components was found by comparing with several kinds of Watts components.The merit of Ti-Cu crystal seeded layer was found by comparing with other materials.Cantilever,baffle and drive-electrode in Micro machined tunneling gyroscope were fabricated by Micro-electroforming,and some valuable experimental parameters were obtained.The problems in the process of Micro-electroforming were discussed and solved.Experimental result indicates that cantilever and some else structural layers in MEMS can be fabricated by Micro-electroforming.

关 键 词：微电铸 应用 MEMS结构 实验系统 制造工艺 成分配比 镍电解液 脉冲电铸 设计要求 悬臂梁 结构层 陀螺仪 微机械 材料 晶种 驱动 方波 

分 类 号：TN405.7[电子电信—微电子学与固体电子学] TN402