BST薄膜的膜厚与铁电性能关系研究  

Ferroelectric Properties of Ba_(0.6) Sr_(0.4) TiO_3 Thin Films with Different Film Thicknesses

作　　者：陈宏伟[1] 杨传仁[1] 符春林[1] 高志强[1] 赵莉[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《电子元件与材料》2005年第6期15-17,共3页Electronic Components And Materials

基　　金：国家973资助项目(Z01)

摘　　要：采用射频磁控溅射法制备了Ba.6Sr0.4TiO3(BST)薄膜,研究了不同膜厚的BST薄膜的介电偏压特性曲线和电滞回线。结果表明,当膜厚从250nm增加到650nm时,BST薄膜的εr、εr的电压变化率和最大极化强度分别从195,9%,4.7×10–6C/cm2逐渐增加到1543,19%,30×10–6C/cm2,而矫顽场强随膜厚的变化较复杂。进一步分析发现,膜厚通过影响矫顽场强和最大极化强度进而影响铁电薄膜的电压非线性。BST thin films were prepared by RF magnetron sputtering. The dielectric constant-voltage curves and polarization hysteresis loops of BST thin films with different thicknesses were investigated. When the film thickness increases from 250 nm to 650 nm, the dielectric constant, tunability, and maximal polarization gradually increase from 195, 9%, 4.7×10–6C/cm2 to 1 543, 17%, 30×10–6C/cm2 respectively. However, the coercive electric field sharply increased and then decreased. It is found that the film thickness dependence of the dielectric nonlinearity is determined by that of the coercive electric field and the maximal polarization.

关 键 词：无机非金属材料 BST薄膜 膜厚 铁电性能 

分 类 号：TN384[电子电信—物理电子学]