接触式激光干涉仪的数据采集与处理系统  

Data Acquisition and Processing System of Contact Type of Laser Interferometers

作　　者：浦昭邦[1] 范志刚[1] 张善钟[1] 武晋燮 高松[1] 

机构地区：[1]哈尔滨工业大学,黑龙江省哈尔滨市150006

出　　处：《航空计测技术》1994年第3期3-6,共4页Aviation Metrology & Measurement Technology

摘　　要：讨论了接触式激光干涉议的数据采集与处理系统，其特点是性能稳定，操作灵活。实验证明，该系统满足仪器分辨率为0．01μm，重复性误差在0．03μm以内的要求。This paper introduces the data-gathering and data-processing system of contact-type interferometer using laser. Its characteristic is that the function is stable and the operation is flexible. The testing indicates the system meets the demands of the resolution being 0.01μm and the repeatability being in 0.03μm.

关 键 词：激光干涉仪 数据采集 微机 数据处理 干涉仪 

分 类 号：TH744.3[机械工程—光学工程]