用(110)硅面各向异性腐蚀的凸角结构制作微米针管  

A Novel Fabrication of in-Plane Silicon Microneedles Using Structure of Convex Corner in (110) Si-Wafer

作　　者：郑川[1] 徐晓刚[1] 高文秀[1] 

机构地区：[1]厦门大学,厦门361005

出　　处：《中国机械工程》2005年第13期1161-1164,共4页China Mechanical Engineering

摘　　要：描述了一种用(110)晶面硅片制造微米针管的新方法。利用硅晶面在各向异性腐蚀中出现的凸角结构形成针管的三维构造,针管内径约10μm,外径约90μm,长度约500μm。整个针管结构平坦,便于与微泵等其他MEMS器件相接合,用于无痛皮下注射器和生化采样等。微米针管的制作工艺相对简单,材料廉价,适合于工业化批量生产。The paper presented a novel way to fabricate silicon microneedles with (110) si-wafer. The 3D structure of microneedles were formed by convex corner obtained in standard wet anisotropic etching for bulk micromachining. The microneedle's inner-diameter is about 10 μm. The outer-diameter is about 90 μm and the length is about 500 μm. The microneedles are so flat that it can be connected with other MEMS devices such as micropump. It is can be used in no-pain injection and biochemical sampling. The process of fabrication is relatively simple and the materials are inexpensive. So it can be applied to industrial mass productions.

关 键 词：微米针管 MEMS 各向异性腐蚀 凸角结构 (110)晶面 

分 类 号：TH162[机械工程—机械制造及自动化] TN603[电子电信—电路与系统]