光学读出室温物体红外成像  

Optical-Readout Room-temperature Infrared Imaging

作　　者：郭哲颖[1] 张青川[1] 陈大鹏[2] 伍小平[1] 董凤良[1] 缪正宇[1] 熊志铭[1] 李超波[2] 

机构地区：[1]中国科学技术大学 [2]中科院微电子研究所,北京100029

出　　处：《实验力学》2005年第2期213-218,共6页Journal of Experimental Mechanics

基　　金：国家自然科学重点基金(10232030)和面上基金(50076040和10472111)资助项目

摘　　要：光学读出式红外成像系统是近年来提出的一种新型红外成像技术,它是基于探测双材料微悬臂梁吸收红外辐射后的变形。本文采用了谱平面刀口滤波方法,将双材料(SiNx/Au)微梁阵列接收热像后的转角变形转化为像平面上微梁阵列的像所对应的光强变化,并设计制作了无基底单层膜结构微梁阵列(100×100pixels,微梁尺寸200×200μm2,厚2μm)。用该阵列在光学读出系统中,获得了室温下人体的热图像。该系统在室温时(300K)噪声等效温度差(NETD)达到0.2K。Optical readout uncooled infrared imaging is a novel technique presented recently. In this paper, optical filter technique is applied to detect the thermal deformation of the micro bimaterial(SiNx/Au) cantilever array caused by absorbing the IR radiation. By knife edge filtering operation on the spectrum plane, the incline angle of micro cantilever arrays is converted to the image intensity changing of micro cantilever array in image plane. A micro cantilever array of 100×100 pixels, arranged in a single film of 2μm thickness without substrate, is designed and fabricated. By the presented optical readout system and the fabricated arrays, we obtain a thermal image of human body at room temperature. Analysis of experimental data indicates that the noise equivalent temperature deference (NETD) of the system at room temperature (300K) is about 0.2K.

关 键 词：微悬臂梁 红外成像 光学读出 光电效应 

分 类 号：TN215[电子电信—物理电子学]