热传导在激光再结晶中的作用  

The Role of Thermal Diffusion in Laser Recrystallization

作　　者：王红卫[1] 杨景铭[1] 栾洪发 钱佩信[1] 

机构地区：[1]清华大学微电子学研究所

出　　处：《微电子学与计算机》1995年第2期46-47,共2页Microelectronics & Computer

摘　　要：本文借助于计算机模拟，定性分析了热传导对于形成反射条结构激光再结晶过程中温度双峰分布的重要作用。结果表明，影响再结晶质量的激光功率、高反区条宽以及反射率差等因素是通过热传导过程相互制约的。By using computer modeling, this paper qualitively indicated the imPOrtant role of thermal diffusion in forming two-peak distribution of temperature in laser recrystallization with renective-stripe structure. The results showed that it was through the process of thermal diffusion that the factors such as laser power,high-renective-stripe width and renectivity difference conditioned each other in affecting the recrystallizating quality.

关 键 词：SOI 硅 激光再结晶 热传导 

分 类 号：TN304.12[电子电信—物理电子学]