MEMS结构氧传感器的研究  

Study of Oxygen Sensor with MEMS Structure

作　　者：邱成军[1] 刘鑫[1] 曲伟[1] 张辉军[1] 

机构地区：[1]黑龙江大学集成电路重点实验室,哈尔滨150080

出　　处：《传感技术学报》2005年第3期531-533,共3页Chinese Journal of Sensors and Actuators

基　　金：教育部资助项目(204047)

摘　　要：采用微加工技术研制了一种以硅为基底材料,具有MEMS结构的氧传感器。阐述了该传感器的工作原理、结构设计、工艺流程以及特性分析。给出了溅射制备TiO2薄膜的方法及锐钛矿型晶体结构能谱,讨论了二氧化钛的氧敏机理。研究表明与传统的气体传感器相比,此种传感器具有体积小、低功耗、可集成的特点。An oxygen sensor on silicon substrate was fabricated by microelectronic mechanical system technology. Its operation principle,design and technological process were described. The oxygen sensitive filmtitania thin film was formed by magnetron sputtering. From XRD spectrum the structure of the film was anatase. Experiment results confirmed with the oxygen-sensitive mechanism of the sensor. The recovery and response characteristic and oxygen sensitivity curves of the sensor were given out.

关 键 词：MEMS 氧传感器 磁控溅射 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN405[自动化与计算机技术—控制科学与工程]