压电驱动超精密加工微定位工作台的设计与研究  

Development of Micro-Positioning Platform Driven by PZT for Ultra Precision Machining

作　　者：朱振华[1] 李蓓智[1] 杨建国[1] 

机构地区：[1]东华大学机械工程学院,上海200051

出　　处：《机械科学与技术》2005年第9期1026-1028,共3页Mechanical Science and Technology for Aerospace Engineering

基　　金：上海市科技攻关项目(041111007)资助

摘　　要：设计开发了一种用于超精密加工的新型压电驱动微定位工作台(PBMPM-PZT Based M icro-position ing P lat-form forM ach in ing)。利用力学理论,对柔性铰链和平行铰链运动副进行建模,推导出其刚度理论计算公式。同时,用有限元方法分析了由柔性铰链构建的微定位工作台静、动态特性和振动特性。理论分析、有限元计算和实验结果的一致性说明了理论分析的正确性和数值分析的可靠性。A novel micro-positioning table for ultra-machining lathe was developed. The model of the flexure hinge and the platform were set up, and the theory of general mechanics was used to analyze the stiffness of the platform. Meanwhile, the static and the dynamic characteristics of the platform were deduced with the finite elements analysis（FEA） software ANSYS. The feasibility of the theoretic formula and the FEA analysis method was proved by the agreement of the theoretic results with FEA results and the experiment results.

关 键 词：柔性铰链 压电陶瓷 微定位 有限元 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]