直线电机精密工作台运动控制器设计  

Motion Controller Design of Precision Stage Based on Linear Motor

作　　者：杨开明[1] 叶佩青[1] 尹文生[1] 

机构地区：[1]清华大学精仪系制造工程研究所,北京100084

出　　处：《微细加工技术》2005年第3期76-80,共5页Microfabrication Technology

基　　金：国家863资助项目(2001AA423260)

摘　　要：为了提高精密工作台的轨迹跟踪精度和动态响应性能,基于辨识出的控制对象离散化模型,利用极点配置方法设计了精密工作台运动控制器的前馈环节和反馈环节,构成具有两自由度结构的精密工作台运动控制系统。通过实验,与PD+加速度前馈的控制方式相比较,精密工作台静态定位误差提高了0.5μm;当精密工作台以120 mm/s匀速运动时,轨迹跟踪精度提高了3μm;定位建立时间缩短了10 ms。结果表明,采用极点配置方法设计的运动控制器具有较好的动态响应和轨迹跟踪性能。In order to improve the tracking accuracy and dynamical response of the precision stage, based on the discrete model of the identified control object, pole assignment method is used to design the feedforward loop and feedback loop of the motion controller for the precision stage. In the test experiments, compared to the PD control with acceleration feedforward, the static positioning accuracy is improved by 0.5 μm, and the tracking accuracy is improved by 3 μm at the uniform speed of 120 mm/s, while the positioning establishment time is reduce by 10 ms. The results show that motion controllers based on the pole assignment method have much better dynamical response and tracking performance.

关 键 词：精密工作台 直线电机 运动控制 极点配置 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]